Web31 Aug 1999 · Author(s): Aylin Hein; Stefan Finkbeiner; Jiri Marek; Ernst Obermeier Show Abstract Smart MEMS devices such as pressure, mass flow and yaw rate sensors are presented in detail. WebView the profiles of people named Aylin Hein. Join Facebook to connect with Aylin Hein and others you may know. Facebook gives people the power to share...
Material-related effects on wet chemical micromachining of smart …
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Material-related effects on wet chemical …
Web30 Dec 2002 · Aylin Hein; Im Rahmen dieser Arbeit wurden die Einflüsse herstellungsbedingter Fremdstoffe in KOH-Ätzlösungen und im Siliciumkristall auf das Ätzverhalten untersucht und Reinheitsbedingungen ... WebHein provides an excellent guide to an alternative theory that draws on the ideas of Kalecki and Steindl. After reviewing the contributions of these pioneers, he provides an … Web16 Jun 1997 · @article{Dorsch1997EffectOT, title={Effect of the silicon content of aqueous KOH on the etching behaviour of convex corners in <100> single crystalline silicon}, … upcoming gospel concerts near me